Shape control in wafer-based aperiodic 3D nanostructures
نویسندگان
چکیده
منابع مشابه
Shape control in wafer-based aperiodic 3D nanostructures.
Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continu...
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ژورنال
عنوان ژورنال: Nanotechnology
سال: 2014
ISSN: 0957-4484,1361-6528
DOI: 10.1088/0957-4484/25/23/235302